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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] Microfluidics and BioMEMS - Simulations of a microvalve and a micropump
Xu, Yuan, Choong, Wen O., Tay, Francis E., Zhang, Xuanxiong, Kong, Yen-Peng, Gong, Haiqing, Mastrangelo, Carlos H., Becker, HolgerVolume:
4560
Year:
2001
Language:
english
DOI:
10.1117/12.443070
File:
PDF, 481 KB
english, 2001