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SPIE Proceedings [SPIE Aerospace/Defense Sensing, Simulation, and Controls - Orlando, FL (Monday 16 April 2001)] Infrared Technology and Applications XXVII - Thermoelectric infrared microsensor using suspended membranes made by silicon micromachining
Godts, Pascale, Andresen, Bjorn F., Fulop, Gabor F., Ziouche, Katir, Boutchich, M., Strojnik, Marija, Leclercq, DidierVolume:
4369
Year:
2001
Language:
english
DOI:
10.1117/12.445332
File:
PDF, 202 KB
english, 2001