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SPIE Proceedings [SPIE NDE For Health Monitoring and Diagnostics - San Diego, CA (Sunday 17 March 2002)] Nondestructive Evaluation and Reliability of Micro- and Nanomaterial Systems - Micromaterials Center Berlin: reliability research for MEMS
Michel, Bernd, Winkler, Thomas, Meyendorf, Norbert, Baaklini, George Y., Michel, BerndVolume:
4703
Year:
2002
Language:
english
DOI:
10.1117/12.469614
File:
PDF, 1.13 MB
english, 2002