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SPIE Proceedings [SPIE SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems - Melbourne, Australia (Monday 16 December 2002)] Nano- and Microtechnology: Materials, Processes, Packaging, and Systems - Ba(Mg 1/3 Ta 2/3 )O 3 substrate for Ba x Sr 1-x TiO 3 thin film used for phase shifter
Fu, Chunlin, Sood, Dinesh K., Malshe, Ajay P., Chen, Hongwei, Huang, Chungen, Maeda, Ryutaro, Hu, Jiang, Hu, Wencheng, Li, Wenyuan, Yang, ChuanrenVolume:
4936
Year:
2002
Language:
english
DOI:
10.1117/12.469680
File:
PDF, 1.56 MB
english, 2002