SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 25 January 2003)] Micromachining and Microfabrication Process Technology VIII - Batch fabricated silicon electrostatic micropositioner for dual stage actuation
Del Sarto, Marco, Yasaitis, John A., Perez-Maher, Mary Ann, Sassolini, Simone, Baldo, Lorenzo, Karam, Jean Michel, Marchi, Mauro, McCaslin, Martin J.Volume:
4979
Year:
2003
Language:
english
DOI:
10.1117/12.478240
File:
PDF, 1.07 MB
english, 2003