SPIE Proceedings [SPIE High-Power Lasers and Applications - San Jose, CA (Saturday 25 January 2003)] Photon Processing in Microelectronics and Photonics II - New developments in laser processing of silicon devices
Pique, Alberto, Dirscherl, Manfred, Esser, Gerd, Sugioka, Koji, Herman, Peter R., Kaufmann, Stefan, Geiger, Manfred, Fieret, Jim, Bachmann, Friedrich G., Dubowski, Jan J., Hoving, Willem, Washio, KuniVolume:
4977
Year:
2003
Language:
english
DOI:
10.1117/12.479411
File:
PDF, 1.22 MB
english, 2003