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SPIE Proceedings [SPIE Microtechnologies for the New Millennium 2003 - Maspalomas, Gran Canaria, Canary Islands, Spain (Monday 19 May 2003)] Smart Sensors, Actuators, and MEMS - Finline technology for millimeter-wave MEMS
Fu, Jeffrey S., Chiao, Jung-Chih, Varadan, Vijay K., Zhou, Jiaoyun, Lu, Yilong, Can, Carles, Ma, Jianguo, Shen, ZhongxiangVolume:
5116
Year:
2003
Language:
english
DOI:
10.1117/12.487702
File:
PDF, 103 KB
english, 2003