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SPIE Proceedings [SPIE Advanced Microelectronic Manufacturing - Santa Clara, CA (Sunday 23 February 2003)] Design and Process Integration for Microelectronic Manufacturing - Characterization and modeling of intradie variation and its applications to design for manufacturability
Saxena, Sharad, Starikov, Alexander, Guardiani, Carlo, Quarantelli, Michele, Dragone, Nicola, Minehane, Sean, McNamara, Patrick, Babcock, Jeff A.Volume:
5042
Year:
2003
Language:
english
DOI:
10.1117/12.497477
File:
PDF, 131 KB
english, 2003