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SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, California, USA (Sunday 3 August 2003)] Surface Scattering and Diffraction III - Appearance characterization by a scatterometer employing a hemispherical screen
Gu, Zu-Han, Wadman, Sipke, Baumer, Stefan, Maradudin, Alexei A.Volume:
5189
Year:
2003
Language:
english
DOI:
10.1117/12.503560
File:
PDF, 537 KB
english, 2003