SPIE Proceedings [SPIE San Diego, '91, San Diego, CA - San Diego, CA (Sunday 21 July 1991)] Multilayer and Grazing Incidence X-Ray/EUV Optics - Tungsten/boron nitride multilayers for XUV optical applications
Boher, Pierre, Hoover, Richard B., Hennet, Louis, Pierre, F., Smith, David J., Modak, Abhijit U., Idir, M., Barchewitz, Robert J.Volume:
1546
Year:
1991
Language:
english
DOI:
10.1117/12.51212
File:
PDF, 2.15 MB
english, 1991