SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 24 January 2004)] Reliability, Testing, and Characterization of MEMS/MOEMS III - Novel low coherence metrology for nondestructive characterization of high-aspect-ratio microfabricated and micromachined structures
Walecki, Wojciech, Tanner, Danelle M., Ramesham, Rajeshuni, Wei, Frank, Van, Phuc, Lai, Kevin, Lee, Tim, Lau, S. H., Koo, AnnVolume:
5343
Year:
2004
Language:
english
DOI:
10.1117/12.530749
File:
PDF, 134 KB
english, 2004