SPIE Proceedings [SPIE Madras - DL tentative - Madras, India (Saturday 1 February 1992)] Conference on Physics and Technology of Semiconductor Devices and Integrated Circuits - Room temperature hydrogenation studies on silicon
Srivastava, P. C., Tripathi, Deep N., Chandra, S.Volume:
1523
Year:
2013
Language:
english
DOI:
10.1117/12.56980
File:
PDF, 115 KB
english, 2013