SPIE Proceedings [SPIE Photonics Asia 2004 - Beijing, China (Monday 8 November 2004)] MEMS/MOEMS Technologies and Applications II - Silicon scanning mirror with 54.74° slanted reflective surface for fluorescence scanning system
Lee, Kook-Nyung, Ma, Zhichun, Jin, Guofan, Jang, Yun-Ho, Choi, Jaeho, Chen, Xuyuan, Kim, Hoseoung, Lee, Yoon-Sik, Kim, Yong-KweonVolume:
5641
Year:
2004
Language:
english
DOI:
10.1117/12.575974
File:
PDF, 865 KB
english, 2004