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SPIE Proceedings [SPIE Smart Materials, Nano-, and Micro-Smart Systems - Sydney, Australia (Sunday 12 December 2004)] Smart Structures, Devices, and Systems II - Technology interfaces to microsystem and nanoelectronic processes
Schmidt, Thilo, Al-Sarawi, Said F., Wagener, Andreas, Popp, Jens, Hahn, KaiVolume:
5649
Year:
2004
Language:
english
DOI:
10.1117/12.581830
File:
PDF, 526 KB
english, 2004