SPIE Proceedings [SPIE Smart Materials, Nano-, and Micro-Smart Systems - Sydney, Australia (Sunday 12 December 2004)] Smart Structures, Devices, and Systems II - Wafer-level packaging of pressure sensor using SU8 photoresist
Iliescu, Ciprian I., Al-Sarawi, Said F., Tay, Francis E. H., Miao, Jianmin, Avram, MarioaraVolume:
5649
Year:
2004
Language:
english
DOI:
10.1117/12.582235
File:
PDF, 175 KB
english, 2004