SPIE Proceedings [SPIE Lasers and Applications in Science and Engineering - San Jose, CA (Saturday 22 January 2005)] Photon Processing in Microelectronics and Photonics IV - New laser patterning technology with dynamic focus control for 3D MIDs (Invited Paper)
Fieret, Jim, Suzuki, Toshiyuki, Shindo, T., Herman, Peter R., Okada, Tatsuo, Yuasa, Shingo, Arnold, Craig B., Bachmann, Friedrich G., Hoving, Willem, Washio, Kunihiko, Lu, Yongfeng, Geohegan, David B.Volume:
5713
Year:
2005
Language:
english
DOI:
10.1117/12.593358
File:
PDF, 600 KB
english, 2005