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SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Advances in Resist Technology and Processing XXII - Characterization of property variation in ultra-thin polymer films from molecular simulation
Singh, Lovejeet, Sturtevant, John L., Henderson, Clifford L., Ludovice, Peter J.Volume:
5753
Year:
2005
Language:
english
DOI:
10.1117/12.607435
File:
PDF, 176 KB
english, 2005