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SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Ion implantation into Si covered by HfO2 or SiO2 film
Shi, Hao, Yu, Min, Huang, Ru, Zhang, Xing D., Wang, Yangyuan, Chu, Junhao, Lai, Zongsheng, Wang, Lianwei, Xu, ShaohuiYear:
2012
Language:
english
DOI:
10.1117/12.607558
File:
PDF, 306 KB
english, 2012