SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 13 June 2005)] Nano- and Micro-Metrology - Development and test of a profilometer based on a low-cost white-light bench microscope with a linear sensor
Macedo, Milton P., Ottevaere, Heidi, DeWolf, Peter, Fernandes, Ana G., Correia, Carlos M., Wiersma, Diederik S.Volume:
5858
Year:
2005
Language:
english
DOI:
10.1117/12.637258
File:
PDF, 296 KB
english, 2005