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SPIE Proceedings [SPIE 2nd international Symposium on Advanced Optical Manufacturing and Testing Technologies - Xian, China (Wednesday 2 November 2005)] 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies - The amendment of the removal function model in edge effect
Yang, Li, Shang, Wenjin, Dai, Yifan, Wen, Shangming, Chen, Yaolong, Zhou, Xusheng, Kley, Ernst-BernhardVolume:
6149
Year:
2005
Language:
english
DOI:
10.1117/12.674305
File:
PDF, 303 KB
english, 2005