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SPIE Proceedings [SPIE 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies - Xian, China (Wednesday 2 November 2005)] 2nd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment - Research on technique of grating nanometer-subdivision
Xu, Jin, Hou, Xun, Yuan, Jiahu, Cao, Xiangqun, Ni, Xuxiang, Wyant, James C., Wang, Hexin, Lu, Zukang, Han, SenVolume:
6150
Year:
2005
Language:
english
DOI:
10.1117/12.676406
File:
PDF, 242 KB
english, 2005