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SPIE Proceedings [SPIE SPIE Optics + Photonics - San Diego, California, USA (Sunday 13 August 2006)] Advances in X-Ray/EUV Optics, Components, and Applications - Air convection noise of pencil-beam interferometer for long trace profiler
Yashchuk, Valeriy V., Khounsary, Ali M., Morawe, Christian, Irick, Steve C., MacDowell, Alastair A., McKinney, Wayne R., Takacs, Peter Z.Volume:
6317
Year:
2006
Language:
english
DOI:
10.1117/12.681297
File:
PDF, 2.13 MB
english, 2006