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SPIE Proceedings [SPIE MOEMS-MEMS 2007 Micro and Nanofabrication - San Jose, California, United States (Saturday 20 January 2007)] MEMS/MOEMS Components and Their Applications IV - Micromachined silicon grids for direct TEM and Raman characterization of CVD grown carbon nanotubes
Choi, Yongho, Tadigadapa, Srinivas A., Ghodssi, Reza, Ural, Ant, Henning, Albert K.Volume:
6464
Year:
2007
Language:
english
DOI:
10.1117/12.707522
File:
PDF, 1.87 MB
english, 2007