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SPIE Proceedings [SPIE The 14th International Symposium on: Smart Structures and Materials & Nondestructive Evaluation and Health Monitoring - San Diego, California (Sunday 18 March 2007)] Active and Passive Smart Structures and Integrated Systems 2007 - Studies on small circular membrane mirrors with electrostatic actuation and closed loop control
Korde, Umesh A., Matsuzaki, Yuji, Ahmadian, Mehdi, Wickersham, Miles A., Farke, Joseph J., Leo, Donald J., Hofacker, Mark E.Volume:
6525
Year:
2007
Language:
english
DOI:
10.1117/12.711200
File:
PDF, 732 KB
english, 2007