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SPIE Proceedings [SPIE Advanced Lithography - San Jose, CA (Sunday 25 February 2007)] Optical Microlithography XX - Transistor-based electrical test structures for lithography and process characterization
Poppe, Wojtek J., Flagello, Donis G., Holwill, Juliet, Pang, Liang-Teck, Friedberg, Paul, Liu, Qingguo, Alarcon, Louis, Neureuther, AndrewVolume:
6520
Year:
2007
Language:
english
DOI:
10.1117/12.711613
File:
PDF, 293 KB
english, 2007