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SPIE Proceedings [SPIE Microtechnologies for the New Millennium - Maspalomas, Gran Canaria, Spain (Wednesday 2 May 2007)] Smart Sensors, Actuators, and MEMS III - Silicon cantilever sensor for micro-/nanoscale dimension and force metrology
Peiner, Erwin, Becker, Thomas, Cané, Carles, Doering, Lutz, Balke, Michael, Barker, N. Scott, Christ, AndreasVolume:
6589
Year:
2007
Language:
english
DOI:
10.1117/12.721951
File:
PDF, 1.24 MB
english, 2007