SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 18 June 2007)] Optical Measurement Systems for Industrial Inspection V - In-plane displacement measurement with sub-pixel resolution: application to vibration characterization of a shear-force scanning probe
Sandoz, Patrick, Osten, Wolfgang, Gorecki, Christophe, Friedt, Jean-Michel, Carry, Émile, Novak, Erik L.Volume:
6616
Year:
2007
Language:
english
DOI:
10.1117/12.727070
File:
PDF, 844 KB
english, 2007