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SPIE Proceedings [SPIE European Mask and Lithography Conf 2007 - Grenoble, France (Monday 22 January 2007)] 23rd European Mask and Lithography Conference - Resist and BARC outgassing measured by TD-GCMS: investigation during the exposure or the bake steps of the lithographic process
Tiron, Raluca, Sourd, Claire, Fontaine, Hervé, Cetre, Sylviane, Mortini, BénédicteVolume:
6533
Year:
2007
Language:
english
DOI:
10.1117/12.736532
File:
PDF, 2.29 MB
english, 2007