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SPIE Proceedings [SPIE Microelectronics, MEMS, and Nanotechnology - Canberra, ACT, Australia (Wednesday 5 December 2007)] Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV - RF-MEMS switches with new beam geometries: improvement of yield and lowering of actuation voltage
Chan, King Yuk, Tan, Hark Hoe, Chiao, Jung-Chih, Daneshmand, Mojgan, Mansour, Raafat R., Faraone, Lorenzo, Jagadish, Chennupati, Ramer, Rodica, Williams, Jim, Wilson, Alan R.Volume:
6800
Year:
2007
Language:
english
DOI:
10.1117/12.769331
File:
PDF, 945 KB
english, 2007