SPIE Proceedings [SPIE Optical Engineering + Applications - San Diego, California, USA (Sunday 10 August 2008)] Reflection, Scattering, and Diffraction from Surfaces - Analysis of the uniqueness of an inverse grating characterization method
Gu, Zu-Han, Trauter, Bastian, Hetzler, Jochen, Hanssen, Leonard M., Brenner, Karl-HeinzVolume:
7065
Year:
2008
Language:
english
DOI:
10.1117/12.793688
File:
PDF, 395 KB
english, 2008