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SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - The method of thin metal films adhesion increasing for the lowered dimensions structures
Kazanskiy, N. L., Kolpakov, V. A., Paranin, V. D., Polikarpov, M. S., Valiev, Kamil A., Orlikovsky, Alexander A.Year:
2012
Language:
english
DOI:
10.1117/12.802364
File:
PDF, 397 KB
english, 2012