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SPIE Proceedings [SPIE International Symposium on Instrumentation Science and Technology - Shenyang, China (Monday 15 September 2008)] Fifth International Symposium on Instrumentation Science and Technology - Compensation of motion error in a high accuracy AFM
Cui, Yuguo, Tan, Jiubin, Wen, Xianfang, Arai, Yoshikazu, He, Gaofa, Asai, Takemi, Gao, WeiVolume:
7133
Year:
2008
Language:
english
DOI:
10.1117/12.810123
File:
PDF, 909 KB
english, 2008