SPIE Proceedings [SPIE SPIE MOEMS-MEMS: Micro- and Nanofabrication - San Jose, CA (Saturday 24 January 2009)] Advanced Fabrication Technologies for Micro/Nano Optics and Photonics II - Advances in diffractive nanophotonics enabled by commercial photoreduction lithography
Greiner, Christoph M., Suleski, Thomas J., Schoenfeld, Winston V., Iazikov, Dmitri, Mossberg, Thomas W., Wang, Jian J.Volume:
7205
Year:
2009
Language:
english
DOI:
10.1117/12.811619
File:
PDF, 272 KB
english, 2009