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SPIE Proceedings [SPIE SPIE Photonics Europe - Brussels, Belgium (Monday 12 April 2010)] Optical Micro- and Nanometrology III - Sensitivity enhancement of bimaterial MOEMS thermal imaging sensor array using 2-λ wavelength readout
Ferhanoĝlu, O., Gorecki, Christophe, Asundi, Anand K., Urey, H., Osten, WolfgangVolume:
7718
Year:
2010
Language:
english
DOI:
10.1117/12.854753
File:
PDF, 946 KB
english, 2010