![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 1 August 2010)] Advances in Metrology for X-Ray and EUV Optics III - Recent upgrades to the Diamond-NOM: A slope measuring profiler capable of characterizing the surface profile of large optics with sub-nanometer repeatability
Alcock, Simon G., Assoufid, Lahsen, Takacs, Peter Z., Sawhney, Kawal J. S., Scott, Stewart, Asundi, Anand K.Volume:
7801
Year:
2010
Language:
english
DOI:
10.1117/12.861623
File:
PDF, 8.78 MB
english, 2010