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SPIE Proceedings [SPIE Photonics Asia 2010 - Beijing, China (Monday 18 October 2010)] Optical Metrology and Inspection for Industrial Applications - A simple optical system for measuring small rotation angle of mechanism
Li, Weijun, Harding, Kevin, Huang, Peisen S., Ma, Qinwei, Li, Dongwei, Yoshizawa, Toru, Liu, Siyang, Yuan, ChenVolume:
7855
Year:
2010
Language:
english
DOI:
10.1117/12.871325
File:
PDF, 459 KB
english, 2010