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SPIE Proceedings [SPIE Seventh International Conference on Thin Film Physics and Applications - Shanghai, China (Friday 24 September 2010)] Seventh International Conference on Thin Film Physics and Applications - Study of TCR of TiW alloy films deposited by magnetron sputtering
Cai, Changlong, Chu, Junhao, Wang, Zhanshan, Zhai, Yujia, Zhou, Shun, Liu, Huan, Huang, Jing, Liu, WeiguoVolume:
7995
Year:
2010
Language:
english
DOI:
10.1117/12.888281
File:
PDF, 226 KB
english, 2010