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SPIE Proceedings [SPIE SPIE Photomask Technology - Monterey, California (Monday 19 September 2011)] Photomask Technology 2011 - PPF-Explorer: pointwise proximity function calibration using a new radial symmetric calibration structure
Galler, R., Maurer, Wilhelm, Abboud, Frank E., Krueger, M., Melzer, D., Ramos, L. E., Suelzle, M., Weidenmueller, U.Volume:
8166
Year:
2011
Language:
english
DOI:
10.1117/12.896759
File:
PDF, 547 KB
english, 2011