SPIE Proceedings [SPIE Photonics and Optoelectronics Meetings 2011 - Wuhan, China (Wednesday 2 November 2011)] Photonics and Optoelectronics Meetings (POEM) 2011: Laser and Terahertz Science and Technology - Ion energy spectrum and magnetic foil trap debris mitigation efficiency of the laser produced plasma sources for extreme ultraviolet lithography

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