SPIE Proceedings [SPIE Microlithography Conference - Santa Clara, CA (Monday 2 March 1987)] Advances in Resist Technology and Processing IV - New PCM (HR-PCM) Technique Using Novolak-Diazide Type Photoresist As A Bottom Layer
Yamashita, Yoshio, Jinbo, Hideyuki, Kawazu, Ryuji, Ohno, Seigo, Asano, Takateru, Kobayashi, Kenji, Nagamatsu, Gentaro, Bowden, Murrae J.Volume:
771
Year:
1987
Language:
english
DOI:
10.1117/12.940334
File:
PDF, 6.31 MB
english, 1987