SPIE Proceedings [SPIE 1988 Intl Congress on Optical Science and Engineering - Hamburg, Germany (Monday 19 September 1988)] In-Process Optical Measurements - A New Interferometer For Measuring Ultra-Small Thickness And Spacing
Wang, Dong-sheng, Liang, Jin-wen, Spring, Kenneth H.Volume:
1012
Year:
1989
Language:
english
DOI:
10.1117/12.949336
File:
PDF, 232 KB
english, 1989