SPIE Proceedings [SPIE 1989 Microlithography Conferences - San Jose, CA (Monday 27 February 1989)] Advances in Resist Technology and Processing VI - Polymer Chain Configurations In Constrained Geometries: Ultrathin Polymer Films For Microlithography
Kuan, S. W. J., Martin, P. S., Frank, C. W., Pease, R. F. W., Reichmanis, ElsaVolume:
1086
Year:
1989
Language:
english
DOI:
10.1117/12.953037
File:
PDF, 6.81 MB
english, 1989