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SPIE Proceedings [SPIE 1989 Intl Congress on Optical Science and Engineering - Paris, France (Monday 24 April 1989)] X-Ray Instrumentation in Medicine and Biology, Plasma Physics, Astrophysics, and Synchrotron Radiation - X-Ray Conversion Efficiency In Laser-Produced Plasmas. Application To X-Ray Lithography
Toubhans, I., Fabbro, R, Gauthier, J. C., Chaker, M., Pepin, H., Benattar, ReneVolume:
1140
Year:
1989
Language:
english
DOI:
10.1117/12.961845
File:
PDF, 549 KB
english, 1989