Crossing the Resolution Limit in Near-Infrared Imaging of Silicon Chips: Targeting 10-nm Node Technology
Agarwal, Krishna, Chen, Rui, Koh, Lian Ser, Sheppard, Colin J. R., Chen, XudongVolume:
5
Language:
english
Journal:
Physical Review X
DOI:
10.1103/PhysRevX.5.021014
Date:
May, 2015
File:
PDF, 3.13 MB
english, 2015