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SPIE Proceedings [SPIE San Diego '92 - San Diego, CA (Sunday 19 July 1992)] Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography - Mirror cell design, fabrication, assembly, and test for the AXAF VETA-I optics
Matthews, Gary, Buettner, Arthur, Casey, Thomas M., Drauglis, Clyde, LesVeaux, John, Hoover, Richard B., Walker II, Arthur B. C.Volume:
1742
Year:
1993
Language:
english
DOI:
10.1117/12.140558
File:
PDF, 894 KB
english, 1993