SPIE Proceedings [SPIE Microelectronic Processing '92 - San Jose, CA (Sunday 20 September 1992)] Submicrometer Metallization: Challenges, Opportunities, and Limitations - Collimated sputtering of titanium liner films to control resistance of high-aspect-ratio contacts (Abstract Only)
McDevitt, Thomas L., Pennington, Scott, Cronin, D., Licata, Tom J., Strippe, D., Ryan, James G., Kwok, Thomas, Kikkawa, Takamaro, Shenai, KrishnaVolume:
1805
Year:
1993
Language:
english
DOI:
10.1117/12.145465
File:
PDF, 83 KB
english, 1993