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SPIE Proceedings [SPIE SPIE'S 1993 Symposium on Microlithography - San Jose, CA (Sunday 28 February 1993)] Integrated Circuit Metrology, Inspection, and Process Control VII - Characterization of atomic force microscopy and electrical probing techniques for IC metrology
Toledo-Crow, Ricardo, Vaez-Iravani, Mehdi, Smith, Bruce W., Summa, Joseph R., Postek, Michael T.Volume:
1926
Year:
1993
Language:
english
DOI:
10.1117/12.148946
File:
PDF, 658 KB
english, 1993