SPIE Proceedings [SPIE Optics Quebec - Quebec City, Canada (Monday 16 August 1993)] Laser-Assisted Fabrication of Thin Films and Microstructures - Deep x-ray lithography for micromechanics
Guckel, Henry, Skrobis, Kenneth J., Klein, J., Christenson, Todd R., Wiegele, T., Boyd, Ian W.Volume:
2045
Year:
1994
Language:
english
DOI:
10.1117/12.167569
File:
PDF, 1.93 MB
english, 1994