SPIE Proceedings [SPIE Microelectronic Manufacturing - Austin, TX (Tuesday 18 October 1994)] Microelectronics Technology and Process Integration - Model for the growth of oxides in N<sub>2</sub>O
Dimitrijev, Sima, Harrison, H. Barry, Sweatman, Denis R., Chen, Fusen E., Murarka, Shyam P.Volume:
2335
Year:
1994
Language:
english
DOI:
10.1117/12.186066
File:
PDF, 646 KB
english, 1994