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SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, USA (Saturday 2 February 2013)] Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI - Flexible micro-optics fabrication by direct laser writing toward CMOS compatible 3D optical circuit
Summitt, Chris, Wang, Sunglin, Johnson, Lee, Zaverton, Melissa, Milster, Tom, Takashima, Yuzuru, von Freymann, Georg, Schoenfeld, Winston V., Rumpf, Raymond C.Volume:
8613
Year:
2013
Language:
english
DOI:
10.1117/12.2004996
File:
PDF, 229 KB
english, 2013